Magnetron sputtering system Solvac D19
Manufacturer:
RU-VEMContact name: Mikhail Suvorov
Email: info@ru-vem.ru
Phone: (499) 710-60-00, (499) 710-60-11
Website: www.ru-vem.ru
Main Purpose:
The unit is designed for the application of metallic coatings by magnetron sputtering, and dielectric coatings by reactive magnetron sputtering with pre-ionic surface cleaning. Device dimensions allow to apply coatings on large-dimension items or large lots of small-sized products.
Technical characteristics and functional parameters:
|
Power |
3х380 V ± 5%, 160A/phase, 50 Hz/ 60 Hz, N, G |
|
Compressed air |
6 кг/см2 |
|
Cooling water |
3-4 кг/см2, 40 л/мин |
|
Exhaust |
DN 40 KF (рабочие газы) |
|
Nitrogen |
1÷1,5 |
|
Oxygen |
1÷1,5 |
|
Argon |
1÷1,5 |
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