Home/Participants/Products/ Magnetron sputtering system Solvac D19

Magnetron sputtering system Solvac D19

 Magnetron sputtering system Solvac D19 Manufacturer: RU-VEM
Contact name: Mikhail Suvorov
Email: info@ru-vem.ru
Phone: (499) 710-60-00, (499) 710-60-11
Website: www.ru-vem.ru

Main Purpose:

The unit is designed for the application of metallic coatings by magnetron sputtering, and dielectric coatings by reactive magnetron sputtering with pre-ionic surface cleaning. Device dimensions allow to apply coatings on large-dimension items or large lots of small-sized products.

Technical characteristics and functional parameters:

Power

3х380 V ± 5%, 160A/phase,

50 Hz/ 60 Hz, N, G

Compressed air

6 кг/см2

Cooling water

3-4 кг/см2, 40 л/мин

Exhaust

DN 40 KF (рабочие газы)

Nitrogen

1÷1,5

Oxygen

1÷1,5

Argon

1÷1,5


Back to the list

X

Ask your question

CAPTCHA