Magnetron sputtering system Solvac D19

The unit is designed for the application of metallic coatings by magnetron sputtering, and dielectric coatings by reactive magnetron sputtering with pre-ionic surface cleaning. Device dimensions allow to apply coatings on large-dimension items or large lots of small-sized products.

Power	3х380 V ± 5%, 160A/phase, 50 Hz/ 60 Hz, N, G
Compressed air	6 кг/см2
Cooling water	3-4 кг/см2, 40 л/мин
Exhaust	DN 40 KF (рабочие газы)
Nitrogen	1÷1,5
Oxygen	1÷1,5
Argon	1÷1,5