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Magnetron sputtering system Solvac D19

Manufacturer:
RU-VEM
Contact name: Mikhail Suvorov
Email:
info@ru-vem.ru
Phone: (499) 710-60-00, (499) 710-60-11
Website:
www.ru-vem.ru
Main Purpose:
The unit is designed for the application of metallic coatings by magnetron sputtering, and dielectric coatings by reactive magnetron sputtering with pre-ionic surface cleaning. Device dimensions allow to apply coatings on large-dimension items or large lots of small-sized products.
Technical characteristics and functional parameters:
Power
|
3х380 V ± 5%, 160A/phase,
50 Hz/ 60 Hz, N, G
|
Compressed air
|
6 кг/см2
|
Cooling water
|
3-4 кг/см2, 40 л/мин
|
Exhaust
|
DN 40 KF (рабочие газы)
|
Nitrogen
|
1÷1,5
|
Oxygen
|
1÷1,5
|
Argon
|
1÷1,5
|
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