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Acoustic studies of three-dimensional structures, the detection of cavities when bonding plates

Company: Science and Technology Center of Nano and Microsystems Engineering of MIET
Contact name: Maxim Mahiboroda
Email: m.makhiboroda@gmail.com
Phone: + (499) 720-69-07
Website: https://miet.ru/structure/s/1526/e/36316/308

Key limit /boundary/ process parameters:

Resolution 10 micron

Equipment:

Acoustic microscope KSI v-350lm, KSI Sonic Industries GmbH

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