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Linear Measurement

Company: Science and Technology Center of Nano and Microsystems Engineering of MIET
Contact name: Maxim Mahiboroda
Email: m.makhiboroda@gmail.com
Phone: + (499) 720-69-07
Website: https://miet.ru/structure/s/1526/e/36316/308

Key limit /boundary/ process parameters:

  • The scan length: from 0,5 microns to 150,000 microns
  • Resolution height: 0.5 nm
  • The minimum size of the scanning field: 0,5 x 0,5 microns
  • The measurement accuracy from 0.5 nm
  • Accurate measurement of the height from 0.1 nm.

Equipment:

  • profilometer Alpha-Step 200
  • Optical profilometer Wyko 9300NT
  • Atomic force microscope SmartSPM, AIST-NT
  • dual-beam system FEI Quanta 3D FEG


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