Linear Measurement
Company:
Science and Technology Center of Nano and Microsystems Engineering of MIET
Contact name: Maxim Mahiboroda
Email: m.makhiboroda@gmail.com
Phone: + (499) 720-69-07
Website: https://miet.ru/structure/s/1526/e/36316/308
Contact name: Maxim Mahiboroda
Email: m.makhiboroda@gmail.com
Phone: + (499) 720-69-07
Website: https://miet.ru/structure/s/1526/e/36316/308
Key limit /boundary/ process parameters:
- The scan length: from 0,5 microns to 150,000 microns
- Resolution height: 0.5 nm
- The minimum size of the scanning field: 0,5 x 0,5 microns
- The measurement accuracy from 0.5 nm
- Accurate measurement of the height from 0.1 nm.
Equipment:
- profilometer Alpha-Step 200
- Optical profilometer Wyko 9300NT
- Atomic force microscope SmartSPM, AIST-NT
- dual-beam system FEI Quanta 3D FEG
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