
Company:
Center "Diagnosis and modification of microstructures and nanostructures" MIET
Contact name: Kukin Vladimir
Email:
kukin@miee.ru
Phone: +7 (499) 720-87-65
Website:
www.miee.ru
Key limit /boundary/ process parameters:
- accelerating voltage - 50 ÷ 30 kV;
- resolution - 0.8 nm - 15 kV, 0.9 nm - 1 kV;
- beam current <= 26 nA.
- accelerating voltage - 500 V ÷ 30 kV;
- resolution - 4.5 nm - 30 kV;
- beam current - 1.5 pA ÷ 65 nA.
- the maximum size of the loaded plate - 150 mm;
- maximum sample weight - 500 g
Back to the list