Analysis of the structure, measurement of geometrical sizes of nano-objects and materials IC methods
Company:
Center "Diagnosis and modification of microstructures and nanostructures" MIET Contact name: Kukin Vladimir
Email: kukin@miee.ru
Phone: +7 (499) 720-87-65
Website: www.miee.ru
Key limit /boundary/ process parameters:
- The accelerating voltage of 300 kV, resolution - 0.2 nm, a cathode of lanthanum hexaboride.
- Electron-ion scanning microscope Helios NanoLab 650 (USA), equipped with systems of deposition of platinum, X-ray analysis, micromanipulator.
- Ion beam: accelerating voltage - 500 V ÷ 30 kV; beam current - 1.5 pA ÷ 65 nA.
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