Director: Kovalev Anatoly
Phone: +7 (499) 720 6944, +7 (499) 720 6969
Address: 6 Solnechnaya alleya, Zelenograd, Moscow, 124527, Russian Federation
Zelenograd Nanotechnology Center is one of leading innovation companies. Today Zelenograd Nanotechnology Center is both: technology business accelerator and fab-lite for IC manufacturing.
Primary aim of Zelenograd Nanotechnology Center activity is transforming science into industrial applications. To achieve this goal we invest in start-up companies, provide technical and business support and ability to use high-tech equipment for new technology research and production prototyping, attract Russian and foreign partners for industrial cooperation.
Research and development:
Production facility allows to design and develop technologies to create new groups of products according to Customer’s requirements. Zelenograd Nanotechnology Center offers services on developing basic and applied solutions in the following key areas:
- High-temperature electronics with operating range of –60°С to +225°С.
- High-dielectric constant film formation processes for IC MIM capacitors.
- Schottky infrared photodetector array cells.
- MOSFET transistor production technology.
Zelenograd Nanotechnology Center provides research and development and technological services for manufacturing a wide range of microelectronics special products:
- Microcircuits Design (IC, MEMS, Soc, SiP) and development of new technology solutions for microcircuit and MEMS-sensors manufacturing, 3D assembly (3D TSV).
- Low-volume multifunctional complex of microcircuits manufacturing.
- Funding of innovation companies, attracting of additional investors.
- Support and development of technology projects, technology transfer, attracting strategic partners and experts.
Important activity of Zelenograd Nanotechnology Center is innovation commercialization for company`s RD and startups. We investigate robotechnics, IoT and BioTech and fund startups in this field of activity. In the investment portfolio there are 30 high-tech startups companies which carry out RD and prototyping of:
Nano- and microelectronics:
Robotics and additive manufacturing © PICASO 3D.
3D IC assembly technology
Systems of control, process of information for position detection based on AMR and GMR-sensors.
Navigation systems and Intellectual systems control for aviation based on MEMS-gyroscopes and accelerometers.
Telecom systems based on of matrix micro-mirrors.
Power saving solutions.
Nonvolatile systems on the base of piezoelectric generator.
R&D of modules of liquids cleaning.
Electronics for medicine.
Biotechnologies for medicine and vaccinology © NIOBIS.
Research of cell structures.
A modern infrastructure that provides full cycle of VLSI design, a full cycle of crystal production of micro - electronics, nano- and micro-system technology (MEMS, NEMS, system-on-chip), the line assembly and testing of the functional and electrical parameters of microelectronic products.
Testing center of JSC “ZNTC” accredited for compliance with the requirements of GOST ISO / IEC 17025-2009 and RD 319.006-97 In the right certification testing of electronic components domestic and foreign production in the accredited area.
For projects in the field of biotechnology and medicine are advanced laboratories (biological, chemical and analytical). In the laboratory, a special infrastructure to work with biological objects and environments, production of medical products.
Crystal production provides multi- production processes CMOS integrated circuits with design rules up to 0.5 m (with the transition in the short term, the projected rate of 0.35 microns) on bulk silicon and SOI - structures magnetoresistive magnetic field sensors, MEMS and NEMS sensors accelerometers and gyroscopes to silicon wafers with a diameter of 150 mm up to 600 wafers per month.
Technological capabilities: projection photolithography with minimum dimensions of 0.5 - 0.35 m .; contact photolithography plates Ø150 mm with the possibility of combining bilateral and sub-micron resolution when operating in contact; spreevaya chemical treatment and processing in the volume of solution semiconductors, dielectrics and metals; implantation of ions in the standard range of energies from 20 to 200 keV with the possibility of implantation of doubly charged ions .. CVD and PECVD deposition processes films SiO2, Si3N4, poly-Si .; atomic layer deposition of dielectric and conductive coatings, rapid annealing for electrical activation of implanted impurities and silicide formation on the surface of active Si- structures and PAC.
Products and services:
Test and functional control services
Энкодер углового положения магнитный ЭУПМ-Х-360-М5
Микросхема интегральная 1382НХ065 преобразователь магнитного поля в синусно-косинусный сигнал
AMR MAGNETIC FIELD SENSORS (МРС10Н… МРС15Н)
AMR ANGULAR SENSOR (MRS-20)
MICROCONTROLLER VLSI 1913VA015
POSITION PROCESSOR ASIC ENC ASIC3
SINGLE-CHIP MAGNETIC POSITION ENCODER ASIC ENC_ASIC2
CURRENT SENSOR MICROCIRCUIT (1382HY015)
Sine-Cosine Interpolation ASIC (angle sensor ASIC) K1382НХ045
SIGNAL POLARITY SENSOR IC (K1382HX034)
CAPACITANCE to VOLTAGE CONVERTER IC (1382HX025)
VLSI 16-bit controller 1894VTS1U
The reliability and quality of work is guaranteed by advanced equipment, comprehensive innovation infrastructure and well-developed network of business contacts with partner organizations.